Shutdown pquest SNF 2005-09-13 18:33:02: Broken wafer in PQuest

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Sep 14 09:37:50 PDT 2005


Removed broken wafer and wiped down the chamber.  Cycled a dummy wafer several times with no problem.  Ran O2 clean.




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