Shutdown pquest SNF 2005-09-17 12:53:11: found turbo off

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Sep 19 08:36:48 PDT 2005

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Turned the mechanical pump back on and restarted the turbo.  Ran an O2 plasma with no problems.

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Next message: Problem pquest SNF 2005-09-19 22:28:11: Wafer clamp is in down position in idle mode
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