Problem pquest SNF 2005-09-19 22:28:11: Wafer clamp is in down position in idle mode
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Tue Sep 20 08:26:42 PDT 2005
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Problem pquest SNF 2005-09-19 22:28:11: Wafer clamp is in down position in idle mode
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Problem pquest SNF 2005-09-20 11:52:00: RF generator and recipe editor on PQuest
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Reset the chamber
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Problem pquest SNF 2005-09-19 22:28:11: Wafer clamp is in down position in idle mode
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Problem pquest SNF 2005-09-20 11:52:00: RF generator and recipe editor on PQuest
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