Comment pquest SNF 2005-09-29 11:17:43: rf power supply

[johnchoi at snf.stanford.edu]

Ran oxygen3 pre-cleaning with just carrier wafer to pre-condition/clean chamber. RF power supply had much trouble tuning. Re-centered manually, and checked previous tuning stub values. After turning rf ps off/on tried again. Had to give it a bit of manual help, and then things seemed fine. Not sure if something was wrong, or the tuning was too far off for given recipe.