Comment pquest SNF 2005-09-29 11:17:43: rf power supply

johnchoi at snf.stanford.edu johnchoi at snf.stanford.edu
Thu Sep 29 11:17:44 PDT 2005


Ran oxygen3 pre-cleaning with just carrier wafer to pre-condition/clean chamber. RF power supply had much trouble tuning. Re-centered manually, and checked previous tuning stub values. After turning rf ps off/on tried again. Had to give it a bit of manual help, and then things seemed fine. Not sure if something was wrong, or the tuning was too far off for given recipe.




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