Shutdown pquest SNF 2005-09-29 17:30:29: carrier wafer broken inside

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Thu Sep 29 20:03:35 PDT 2005


vented chamber , removed broken wafer chips. wet cleaned
chamber with water and ipa. i adjusted the clamping force
and verified wafer handoff.




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