From jimkruger at snf.stanford.edu  Mon Apr  3 16:52:59 2006
From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu)
Date: Mon, 3 Apr 2006 16:52:59 -0700
Subject: Shutdown pquest SNF 2006-04-03 16:52:58: broke wafer in system, needs clean
Message-ID: <mailman.573.1357938563.25846.pquest-pcs@snf.stanford.edu>




From eenriquez at snf.stanford.edu  Mon Apr  3 22:45:12 2006
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Mon, 3 Apr 2006 22:45:12 -0700
Subject: Shutdown pquest SNF 2006-04-03 16:52:58: broke wafer in system, needs clean
Message-ID: <mailman.574.1357938563.25846.pquest-pcs@snf.stanford.edu>

Wet cleaned chamber.  Cycled wafers and ran O2 clean.



From eenriquez at snf.stanford.edu  Thu Apr 13 22:15:47 2006
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Thu, 13 Apr 2006 22:15:47 -0700
Subject: Shutdown pquest SNF 2006-04-13 22:15:45: Burn box not heating
Message-ID: <mailman.575.1357938563.25846.pquest-pcs@snf.stanford.edu>




From eenriquez at snf.stanford.edu  Fri Apr 14 15:18:03 2006
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Fri, 14 Apr 2006 15:18:03 -0700
Subject: Shutdown pquest SNF 2006-04-13 22:15:45: Burn box not heating
Message-ID: <mailman.576.1357938563.25846.pquest-pcs@snf.stanford.edu>

With the current gas setup, a burn box is not required.



From jimkruger at snf.stanford.edu  Mon Apr 17 18:24:00 2006
From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu)
Date: Mon, 17 Apr 2006 18:24:00 -0700
Subject: Comment pquest SNF 2006-04-17 18:24:00: microwave tuning more trouble
Message-ID: <mailman.577.1357938563.25846.pquest-pcs@snf.stanford.edu>

I had trouble keeping the reflected microwave power as low as before ( got 15 instead of 3 or 4) but used the system anyway.  Seemed to etch OK.