Comment pquest SNF 2006-04-17 18:24:00: microwave tuning more trouble

jimkruger at snf.stanford.edu jimkruger at snf.stanford.edu
Mon Apr 17 18:24:00 PDT 2006


I had trouble keeping the reflected microwave power as low as before ( got 15 instead of 3 or 4) but used the system anyway.  Seemed to etch OK.




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