Shutdown pquest SNF 2006-12-10 16:59:27: Broken wafer on chuck
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Mon Dec 11 08:56:59 PST 2006
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Shutdown pquest SNF 2006-12-10 16:59:27: Broken wafer on chuck
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Comment pquest SNF 2006-12-22 11:02:12: Wet cleaned the chamber
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Clean chuck and ran O2 clean.
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Shutdown pquest SNF 2006-12-10 16:59:27: Broken wafer on chuck
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Comment pquest SNF 2006-12-22 11:02:12: Wet cleaned the chamber
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