From jimkruger at snf.stanford.edu Thu Feb 2 14:25:53 2006 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Thu, 2 Feb 2006 14:25:53 -0800 Subject: Problem pquest SNF 2006-02-02 14:25:52: Turbopump stopped running Message-ID: Pump stopped during training From jimkruger at snf.stanford.edu Thu Feb 2 14:34:09 2006 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Thu, 2 Feb 2006 14:34:09 -0800 Subject: Shutdown pquest SNF 2006-02-02 14:34:09: Needs Turbo re-start Message-ID: From cbaxter at snf.stanford.edu Thu Feb 2 14:55:04 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 2 Feb 2006 14:55:04 -0800 Subject: Shutdown pquest SNF 2006-02-02 14:34:09: Needs Turbo re-start Message-ID: re-start turbo pump. From cbaxter at snf.stanford.edu Thu Feb 2 14:55:15 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 2 Feb 2006 14:55:15 -0800 Subject: Problem pquest SNF 2006-02-02 14:25:52: Turbopump stopped running Message-ID: From cbaxter at snf.stanford.edu Thu Feb 2 14:55:20 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 2 Feb 2006 14:55:20 -0800 Subject: Comment pquest SNF 2006-01-26 16:53:18: Log Book Full Message-ID: From cbaxter at snf.stanford.edu Thu Feb 2 14:55:28 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 2 Feb 2006 14:55:28 -0800 Subject: Comment pquest SNF 2005-11-08 19:55:42: log book Message-ID: From eenriquez at snf.stanford.edu Fri Feb 10 15:09:23 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 10 Feb 2006 15:09:23 -0800 Subject: Shutdown pquest SNF 2006-02-10 15:09:19: Broken wafer in chamber Message-ID: From eenriquez at snf.stanford.edu Fri Feb 10 16:55:46 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 10 Feb 2006 16:55:46 -0800 Subject: Shutdown pquest SNF 2006-02-10 15:09:19: Broken wafer in chamber Message-ID: Cleaned chamber and ran O2 clean. Cycled wafers with no problem. From mjarrahi at snf.stanford.edu Sat Feb 11 23:54:24 2006 From: mjarrahi at snf.stanford.edu (mjarrahi at snf.stanford.edu) Date: Sat, 11 Feb 2006 23:54:24 -0800 Subject: Problem pquest SNF 2006-02-11 23:54:23: microwave generator Message-ID: Even after turning on the power switch, the equipment doesn't start, saying "microwave generator is not ready". From eenriquez at snf.stanford.edu Sun Feb 12 08:32:25 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 12 Feb 2006 08:32:25 -0800 Subject: Problem pquest SNF 2006-02-11 23:54:23: microwave generator Message-ID: The vacuum pump was off. This tripped the interlock which disabled the microwave generator. Reset the vacuum pump and ran the user's recipe for about 15 minutes with no problem. From mjarrahi at snf.stanford.edu Sun Feb 19 04:22:24 2006 From: mjarrahi at snf.stanford.edu (mjarrahi at snf.stanford.edu) Date: Sun, 19 Feb 2006 04:22:24 -0800 Subject: Shutdown pquest SNF 2006-02-19 04:22:23: carrier wafer broke Message-ID: From cbaxter at snf.stanford.edu Mon Feb 20 19:15:50 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 20 Feb 2006 19:15:50 -0800 Subject: Shutdown pquest SNF 2006-02-19 04:22:23: carrier wafer broke Message-ID: cleaned up broken wafer inside the chamber. wiped chamber with ipa and cycled hand wafer handoff on auto mode without a problem.