Shutdown pquest SNF 2006-02-19 04:22:23: carrier wafer broke
cbaxter at snf.stanford.edu
cbaxter at snf.stanford.edu
Mon Feb 20 19:15:50 PST 2006
cleaned up broken wafer inside the chamber. wiped
chamber with ipa and cycled hand wafer handoff on auto
mode without a problem.
More information about the pquest-pcs
mailing list