From altug at snf.stanford.edu  Wed Jul  5 16:29:52 2006
From: altug at snf.stanford.edu (altug at snf.stanford.edu)
Date: Wed, 5 Jul 2006 16:29:52 -0700
Subject: Problem pquest SNF 2006-07-05 16:29:52: Setting DC bias is not possible (when RF power is on) 
Message-ID: <mailman.587.1357938563.25846.pquest-pcs@snf.stanford.edu>

Setting DC bias is not possible (when RF power is on). It is 
also not possible to read: temperature, Cl-flow, He backside 
flow.



From eenriquez at snf.stanford.edu  Wed Jul  5 17:43:33 2006
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Wed, 5 Jul 2006 17:43:33 -0700
Subject: Problem pquest SNF 2006-07-05 16:29:52: Setting DC bias is not possible (when RF power is on) 
Message-ID: <mailman.588.1357938563.25846.pquest-pcs@snf.stanford.edu>

Reposition backside He MFC and manometer RF shielding.  Ran user's recipe and O2 plasma clean with no problems.



From eenriquez at snf.stanford.edu  Mon Jul 24 09:22:58 2006
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Mon, 24 Jul 2006 09:22:58 -0700
Subject: Shutdown pquest SNF 2006-07-23 02:42:47: 
Message-ID: <mailman.589.1357938563.25846.pquest-pcs@snf.stanford.edu>

Rehomed the load arm and recovered wafer.  Ran O2 clean.



From mjarrahi at snf.stanford.edu  Mon Jul 24 14:13:09 2006
From: mjarrahi at snf.stanford.edu (mjarrahi at snf.stanford.edu)
Date: Mon, 24 Jul 2006 14:13:09 -0700
Subject: Shutdown pquest SNF 2006-07-24 14:13:09: same problem
Message-ID: <mailman.590.1357938563.25846.pquest-pcs@snf.stanford.edu>




From mjarrahi at snf.stanford.edu  Sun Jul 23 02:42:47 2006
From: mjarrahi at snf.stanford.edu (mjarrahi at snf.stanford.edu)
Date: Sun, 23 Jul 2006 02:42:47 -0700
Subject: Shutdown pquest SNF 2006-07-23 02:42:47: 
Message-ID: <mailman.591.1357938563.25846.pquest-pcs@snf.stanford.edu>

sample slided from holder pin while loading. I pressed ESC 
and stopped the process.



From cbaxter at snf.stanford.edu  Wed Jul 26 22:39:17 2006
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Wed, 26 Jul 2006 22:39:17 -0700
Subject: Comment pquest SNF 2006-07-26 22:39:16: The turbo pump crush..
Message-ID: <mailman.592.1357938563.25846.pquest-pcs@snf.stanford.edu>




From eenriquez at snf.stanford.edu  Fri Jul 28 09:27:35 2006
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Fri, 28 Jul 2006 09:27:35 -0700
Subject: Comment pquest SNF 2006-07-26 22:39:16: The turbo pump crush..
Message-ID: <mailman.593.1357938563.25846.pquest-pcs@snf.stanford.edu>




From eenriquez at snf.stanford.edu  Fri Jul 28 09:29:19 2006
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Fri, 28 Jul 2006 09:29:19 -0700
Subject: Shutdown pquest SNF 2006-07-24 14:13:09: same problem
Message-ID: <mailman.594.1357938563.25846.pquest-pcs@snf.stanford.edu>

Reset the turbo controller.  Ran 2 wafers through the system using the O2 clean recipe with no problems.



From eenriquez at snf.stanford.edu  Fri Jul 28 09:29:33 2006
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Fri, 28 Jul 2006 09:29:33 -0700
Subject: Comment pquest SNF 2006-06-30 10:53:23: Completed chamber wet clean
Message-ID: <mailman.595.1357938563.25846.pquest-pcs@snf.stanford.edu>




From johnchoi at snf.stanford.edu  Mon Jul 31 16:42:23 2006
From: johnchoi at snf.stanford.edu (johnchoi at snf.stanford.edu)
Date: Mon, 31 Jul 2006 16:42:23 -0700
Subject: Comment pquest SNF 2006-07-31 16:42:23: panel fell off
Message-ID: <mailman.596.1357938563.25846.pquest-pcs@snf.stanford.edu>

The panel facing the drytek has fallen off. Didn't touch it. Fell off while looking at chiller.