Problem pquest SNF 2006-07-05 16:29:52: Setting DC bias is not possible (when RF power is on)

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Jul 5 17:43:33 PDT 2006


Reposition backside He MFC and manometer RF shielding.  Ran user's recipe and O2 plasma clean with no problems.




More information about the pquest-pcs mailing list