Shutdown pquest SNF 2006-07-23 02:42:47:
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Mon Jul 24 09:22:58 PDT 2006
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Problem pquest SNF 2006-07-05 16:29:52: Setting DC bias is not possible (when RF power is on)
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Shutdown pquest SNF 2006-07-23 02:42:47:
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Rehomed the load arm and recovered wafer. Ran O2 clean.
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Problem pquest SNF 2006-07-05 16:29:52: Setting DC bias is not possible (when RF power is on)
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Shutdown pquest SNF 2006-07-23 02:42:47:
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