From mjarrahi at snf.stanford.edu  Sat Jun  3 21:44:52 2006
From: mjarrahi at snf.stanford.edu (mjarrahi at snf.stanford.edu)
Date: Sat, 3 Jun 2006 21:44:52 -0700
Subject: Problem pquest SNF 2006-06-03 21:44:51: unstable cl2 & Bcl3
Message-ID: <mailman.580.1357938563.25846.pquest-pcs@snf.stanford.edu>




From cbaxter at snf.stanford.edu  Mon Jun  5 12:18:36 2006
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Mon, 5 Jun 2006 12:18:36 -0700
Subject: Problem pquest SNF 2006-06-03 21:44:51: unstable cl2 & Bcl3
Message-ID: <mailman.581.1357938563.25846.pquest-pcs@snf.stanford.edu>

lowered delivery pressure for cl2 and bcl3 gases. also,
wet cleaned chamber.



From sdogbe at snf.stanford.edu  Wed Jun 14 19:31:05 2006
From: sdogbe at snf.stanford.edu (sdogbe at snf.stanford.edu)
Date: Wed, 14 Jun 2006 19:31:05 -0700
Subject: Problem pquest SNF 2006-06-14 19:31:04: Vent LL to ATM
Message-ID: <mailman.582.1357938563.25846.pquest-pcs@snf.stanford.edu>

Software is not responding to commands.  Can not  put the tool  under standby conditions.



From cbaxter at snf.stanford.edu  Thu Jun 15 08:23:40 2006
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Thu, 15 Jun 2006 08:23:40 -0700
Subject: Problem pquest SNF 2006-06-14 19:31:04: Vent LL to ATM
Message-ID: <mailman.583.1357938563.25846.pquest-pcs@snf.stanford.edu>

reset system and put system on stand by.



From ycjun at snf.stanford.edu  Thu Jun 22 15:26:34 2006
From: ycjun at snf.stanford.edu (ycjun at snf.stanford.edu)
Date: Thu, 22 Jun 2006 15:26:34 -0700
Subject: Shutdown pquest SNF 2006-06-22 15:26:30: wafer broken
Message-ID: <mailman.584.1357938563.25846.pquest-pcs@snf.stanford.edu>

Wafer broken (during unloading)



From eenriquez at snf.stanford.edu  Fri Jun 23 11:03:23 2006
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Fri, 23 Jun 2006 11:03:23 -0700
Subject: Shutdown pquest SNF 2006-06-22 15:26:30: wafer broken
Message-ID: <mailman.585.1357938563.25846.pquest-pcs@snf.stanford.edu>

Removed broken wafer pieces.  Replaced 2 broken lift pins.  Wet cleaned the chamber.  Ran O2 clean with no problems.



From eenriquez at snf.stanford.edu  Fri Jun 30 10:53:23 2006
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Fri, 30 Jun 2006 10:53:23 -0700
Subject: Comment pquest SNF 2006-06-30 10:53:23: Completed chamber wet clean
Message-ID: <mailman.586.1357938563.25846.pquest-pcs@snf.stanford.edu>

Performed chamber wet clean and ran 30 min O2 clean.