Shutdown pquest SNF 2006-06-22 15:26:30: wafer broken

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri Jun 23 11:03:23 PDT 2006


Removed broken wafer pieces.  Replaced 2 broken lift pins.  Wet cleaned the chamber.  Ran O2 clean with no problems.




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