From ssun at snf.stanford.edu  Wed Mar  8 10:57:04 2006
From: ssun at snf.stanford.edu (ssun at snf.stanford.edu)
Date: Wed, 8 Mar 2006 10:57:04 -0800
Subject: Shutdown pquest SNF 2006-03-08 10:57:03: Turbo pump failed. Foreline pressure shows 1999 mTorr
Message-ID: <mailman.569.1357938563.25846.pquest-pcs@snf.stanford.edu>




From eenriquez at snf.stanford.edu  Wed Mar  8 20:32:45 2006
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Wed, 8 Mar 2006 20:32:45 -0800
Subject: Shutdown pquest SNF 2006-03-08 10:57:03: Turbo pump failed. Foreline pressure shows 1999 mTorr
Message-ID: <mailman.570.1357938563.25846.pquest-pcs@snf.stanford.edu>

Repaired foreline leak.  Restarted mechanical and turbo pump. Ran an O2 clean recipe.



From hideoiw at snf.stanford.edu  Tue Mar 21 17:54:22 2006
From: hideoiw at snf.stanford.edu (hideoiw at snf.stanford.edu)
Date: Tue, 21 Mar 2006 17:54:22 -0800
Subject: Shutdown pquest SNF 2006-03-21 17:54:22: A carrier wafer was broken
Message-ID: <mailman.571.1357938563.25846.pquest-pcs@snf.stanford.edu>

A carrier wafer was broken in the main chamber when it was being loaded, The broken wafer was left in the loadlock chamber.Probably, some pieces of the broken wafer fell in the main chamber.



From eenriquez at snf.stanford.edu  Tue Mar 21 23:01:30 2006
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Tue, 21 Mar 2006 23:01:30 -0800
Subject: Shutdown pquest SNF 2006-03-21 17:54:22: A carrier wafer was broken
Message-ID: <mailman.572.1357938563.25846.pquest-pcs@snf.stanford.edu>

Wet cleaned chamber and loadlock.  Ran 02 plasma for 30 minutes and cycled wafers.