Shutdown pquest SNF 2006-03-21 17:54:22: A carrier wafer was broken

hideoiw at snf.stanford.edu hideoiw at snf.stanford.edu
Tue Mar 21 17:54:22 PST 2006


A carrier wafer was broken in the main chamber when it was being loaded, The broken wafer was left in the loadlock chamber.Probably, some pieces of the broken wafer fell in the main chamber.




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