Problem pquest SNF 2006-10-30 18:25:57: lost chips

yiyang at yiyang at
Mon Oct 30 18:25:58 PST 2006

The carrier wafer was tilted when I tried to load, and the chips are now lost in the chamber. They are PMMA on GaAs. Please contact when the system will be opened for monthly clean so I can retrieve the chips.

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