From eenriquez at snf.stanford.edu  Wed Apr  4 17:38:26 2007
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Wed, 4 Apr 2007 17:38:26 -0700
Subject: Comment pquest SNF 2007-04-04 17:38:25: Completed monthly chamber clean
Message-ID: <mailman.641.1357938564.25846.pquest-pcs@snf.stanford.edu>

Wet cleaned the chamber and ran O2 plasma.



From tdo at snf.stanford.edu  Tue Apr 24 03:43:26 2007
From: tdo at snf.stanford.edu (tdo at snf.stanford.edu)
Date: Tue, 24 Apr 2007 03:43:26 -0700
Subject: Problem pquest SNF 2007-04-24 03:43:25: plasma takes long to strike
Message-ID: <mailman.642.1357938564.25846.pquest-pcs@snf.stanford.edu>

Had to wait several mins for plasma to strike at 400W (but it eventually did)



From eenriquez at snf.stanford.edu  Tue Apr 24 08:40:01 2007
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Tue, 24 Apr 2007 08:40:01 -0700
Subject: Problem pquest SNF 2007-04-24 03:43:25: plasma takes long to strike
Message-ID: <mailman.643.1357938564.25846.pquest-pcs@snf.stanford.edu>

No problem found.  Ran O2 clean recipe (400W) two times with no problems.  Plasma started without any delay.   



From cbaxter at snf.stanford.edu  Fri Apr 27 10:22:06 2007
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Fri, 27 Apr 2007 10:22:06 -0700
Subject: Problem pquest SNF 2007-04-27 10:22:05: Cl2 not avail.
Message-ID: <mailman.644.1357938564.25846.pquest-pcs@snf.stanford.edu>

Process that use cl2 will not be avail.



From shott at snf.stanford.edu  Sat Apr 28 12:31:52 2007
From: shott at snf.stanford.edu (shott at snf.stanford.edu)
Date: Sat, 28 Apr 2007 12:31:52 -0700
Subject: Shutdown pquest SNF 2007-04-28 12:31:51: Possible chlorine leak ....
Message-ID: <mailman.645.1357938564.25846.pquest-pcs@snf.stanford.edu>

Shuttind  down in response to internal leak detection (172ppm) in the pquest.
John