From wwang at snf.stanford.edu Wed Aug 1 01:35:25 2007 From: wwang at snf.stanford.edu (wwang at snf.stanford.edu) Date: Wed, 1 Aug 2007 01:35:25 -0700 Subject: Shutdown pquest SNF 2007-08-01 01:35:25: half wafer lost in chamber Message-ID: From wwang at snf.stanford.edu Wed Aug 1 01:36:39 2007 From: wwang at snf.stanford.edu (wwang at snf.stanford.edu) Date: Wed, 1 Aug 2007 01:36:39 -0700 Subject: Shutdown pquest SNF 2007-08-01 01:36:38: half wafer lost in chamber Message-ID: From cbaxter at snf.stanford.edu Wed Aug 1 10:15:54 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 1 Aug 2007 10:15:54 -0700 Subject: Shutdown pquest SNF 2007-08-01 01:36:38: half wafer lost in chamber Message-ID: Vented chamber and removed half of the broken wafer. Also, wet cleaned chamber. Chamber has alot of byproduct build up on the wall which is not normal the chamber wall is useually clean after an o2 clean plasma. From cbaxter at snf.stanford.edu Wed Aug 1 10:15:59 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 1 Aug 2007 10:15:59 -0700 Subject: Shutdown pquest SNF 2007-08-01 01:35:25: half wafer lost in chamber Message-ID: From eenriquez at snf.stanford.edu Wed Aug 1 10:49:35 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 1 Aug 2007 10:49:35 -0700 Subject: Problem pquest SNF 2007-08-01 10:49:35: Cl2 is unavailable Message-ID: Pquest2 Cl2 tie-in. From eenriquez at snf.stanford.edu Thu Aug 2 11:56:20 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 2 Aug 2007 11:56:20 -0700 Subject: Problem pquest SNF 2007-08-01 10:49:35: Cl2 is unavailable Message-ID: Cl2 work completed. Unable to perform the standard 24 hour pressure test. Instead, we ran a leak of the gas line from the P5000 etcher. Leak up rate of the line is 0.4 mT/min. From emyers at snf.stanford.edu Fri Aug 3 11:20:20 2007 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 3 Aug 2007 11:20:20 -0700 Subject: Shutdown pquest SNF 2007-08-03 11:20:20: Cl, HBr Message-ID: Need to verify Cl and Hbr following pquest2 tie-in. From eenriquez at snf.stanford.edu Wed Aug 15 12:37:35 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 15 Aug 2007 12:37:35 -0700 Subject: Comment pquest SNF 2007-08-15 12:37:35: Gas update Message-ID: Helium leak checked both the Cl2 ahd HBr gas panels and found no leaks. We found a small leak on the purge gas line. Also repaired the HBr excess flow switch. Now performing a 24 hour leak up test on the Cl2 line and continuing to pump out the HBr line. If the Cl2 line passes the leak test, we will turn both gases on by noon tomorrow. From cbaxter at snf.stanford.edu Thu Aug 16 13:24:25 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 16 Aug 2007 13:24:25 -0700 Subject: Shutdown pquest SNF 2007-08-03 11:20:20: Cl, HBr Message-ID: CL2 and HBR is back online.. From vsih at snf.stanford.edu Tue Aug 21 15:48:52 2007 From: vsih at snf.stanford.edu (vsih at snf.stanford.edu) Date: Tue, 21 Aug 2007 15:48:52 -0700 Subject: Comment pquest SNF 2007-08-21 15:48:51: out of log book pages Message-ID: From mtang at snf.stanford.edu Wed Aug 22 10:46:00 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 22 Aug 2007 10:46:00 -0700 Subject: Comment pquest SNF 2007-08-22 10:45:59: Cl2 unavailable later today Message-ID: A new Cl2 bottle is due in today. If it arrives as planned, maintenance will shut down the Cl2 line to pump out overnight in preparation for bottle change/panel upgrade tomorrow. Apologies for the inconvenience. Please make sure to check messages and Coral for Cl2 status. From eenriquez at snf.stanford.edu Wed Aug 22 16:52:31 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 22 Aug 2007 16:52:31 -0700 Subject: Problem pquest SNF 2007-08-22 16:52:30: Cl2 is unavailable Message-ID: Cl2 gas cylinder change in progress. From eenriquez at snf.stanford.edu Thu Aug 23 15:34:45 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 23 Aug 2007 15:34:45 -0700 Subject: Comment pquest SNF 2007-08-23 15:34:44: Cl2 update Message-ID: Pumping down the gas line overnight. If no problems, we will turn on the Cl2 by 9:00am. From eenriquez at snf.stanford.edu Fri Aug 24 08:12:01 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 24 Aug 2007 08:12:01 -0700 Subject: Problem pquest SNF 2007-08-22 16:52:30: Cl2 is unavailable Message-ID: Cl2 is now available. We also replaced the filter and regulator. From eenriquez at snf.stanford.edu Fri Aug 24 08:12:28 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 24 Aug 2007 08:12:28 -0700 Subject: Comment pquest SNF 2007-08-22 10:45:59: Cl2 unavailable later today Message-ID: Cl2 is now available. From eenriquez at snf.stanford.edu Fri Aug 24 08:12:46 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 24 Aug 2007 08:12:46 -0700 Subject: Comment pquest SNF 2007-08-23 15:34:44: Cl2 update Message-ID: Cl2 is now available. From eenriquez at snf.stanford.edu Fri Aug 24 08:13:18 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 24 Aug 2007 08:13:18 -0700 Subject: Comment pquest SNF 2007-08-15 12:37:35: Gas update Message-ID: Ok From jimkruger at snf.stanford.edu Fri Aug 24 16:58:04 2007 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Fri, 24 Aug 2007 16:58:04 -0700 Subject: Comment pquest SNF 2007-08-24 16:58:04: New Cl2 regulator looks good Message-ID: I ran "gigi2", a GaAs recipe calling for 1.5 sccm Cl2: got 1.6 sccm indicated. From patlu at snf.stanford.edu Tue Aug 28 00:12:13 2007 From: patlu at snf.stanford.edu (patlu at snf.stanford.edu) Date: Tue, 28 Aug 2007 00:12:13 -0700 Subject: Problem pquest SNF 2007-08-28 00:12:13: stylus nonresponsive Message-ID: frustrating! the stylus/mouse is responding very sluggishly. i noticed that if you hold it at a certain angle it seems to help a bit. From jimkruger at yahoo.com Tue Aug 28 06:54:33 2007 From: jimkruger at yahoo.com (jim kruger) Date: Tue, 28 Aug 2007 06:54:33 -0700 (PDT) Subject: Problem pquest SNF 2007-08-28 00:12:13: stylus nonresponsive In-Reply-To: <20070828071213.EDE054C848@smtp3.stanford.edu> Message-ID: <507055.68392.qm@web38909.mail.mud.yahoo.com> This is a growing problem. It seems worse in the upper right corner of the screeen where it matters most ("Start", and especially "Stop" buttons). I don't know if there might be a a gain adjust for the light pen. If the pen is held pointing a little "up toward the room lights", the "pre-bias" seems to help, as Patrick suggests. jimkruger --- patlu at snf.stanford.edu wrote: > frustrating! the stylus/mouse is responding very > sluggishly. i noticed that if you hold it at a > certain angle it seems to help a bit. > > ____________________________________________________________________________________ Boardwalk for $500? In 2007? Ha! Play Monopoly Here and Now (it's updated for today's economy) at Yahoo! Games. http://get.games.yahoo.com/proddesc?gamekey=monopolyherenow From latta at snf.stanford.edu Wed Aug 29 10:06:18 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 29 Aug 2007 10:06:18 -0700 Subject: Comment pquest SNF 2007-08-21 15:48:51: out of log book pages Message-ID: replenished... From gibby at snf.stanford.edu Thu Aug 30 01:28:16 2007 From: gibby at snf.stanford.edu (gibby at snf.stanford.edu) Date: Thu, 30 Aug 2007 01:28:16 -0700 Subject: Shutdown pquest SNF 2007-08-30 01:28:15: Wafer lost in chamber Message-ID: upon completing an etch, my wafer unloaded. Instead of offering to open the loadlock, an error came up saying that the gate valve could not close unless the arm was at the load position. After I acknowledged the error, the system then tried to unload the chuck again with my wafer still on the transfer arm. When the arm hit the pins, the wafer shattered. Half of my wafer came out of the chamber, while the other half fell into it. Both halfs are important to me, so I would appreciate it if the half in the chamber was retrieved and placed in my wafer box on the table next to the system. (Sorry to Jim K for having to shut the system down). From eenriquez at snf.stanford.edu Thu Aug 30 11:12:59 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 30 Aug 2007 11:12:59 -0700 Subject: Shutdown pquest SNF 2007-08-30 01:28:15: Wafer lost in chamber Message-ID: Recovered user's wafer. Wiped down the chuck. Ran a 10 min O2 clean. We'll perform the monthly chamber clean next Tuesday.