From jparker at snf.stanford.edu Sun Dec 2 20:16:47 2007 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Sun, 2 Dec 2007 20:16:47 -0800 Subject: Shutdown pquest SNF 2007-12-02 20:16:46: Wafer broken Message-ID: Wafer shattered in chamber. From cbaxter at snf.stanford.edu Wed Dec 5 09:37:01 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 5 Dec 2007 09:37:01 -0800 Subject: Shutdown pquest SNF 2007-12-02 20:16:46: Wafer broken Message-ID: Vacuumed broken wafer chips and wet cleaned chamber. From vsih at snf.stanford.edu Wed Dec 5 15:45:01 2007 From: vsih at snf.stanford.edu (vsih at snf.stanford.edu) Date: Wed, 5 Dec 2007 15:45:01 -0800 Subject: Comment pquest SNF 2007-12-05 15:45:00: strange etch results Message-ID: currently troubleshooting whether problem is with resist or etcher. Looks like sample has a lot of polymer buildup and holes also have island features at bottom. From wwang at snf.stanford.edu Tue Dec 11 02:42:33 2007 From: wwang at snf.stanford.edu (wwang at snf.stanford.edu) Date: Tue, 11 Dec 2007 02:42:33 -0800 Subject: Shutdown pquest SNF 2007-12-11 02:42:32: pressure interlock alarm, process pump ready alarm Message-ID: After etching I pulled out my wafer, and then left the system for about 10-15mins. When I came back, I saw both alarms on the front panel red, and I couldn't pump down the process chamber whatsoever. From cbaxter at snf.stanford.edu Tue Dec 11 09:20:12 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 11 Dec 2007 09:20:12 -0800 Subject: Shutdown pquest SNF 2007-12-11 02:42:32: pressure interlock alarm, process pump ready alarm Message-ID: The backing pump shut off, turn pump back on and ramped up turbo pump. From gibby at snf.stanford.edu Wed Dec 12 00:28:05 2007 From: gibby at snf.stanford.edu (gibby at snf.stanford.edu) Date: Wed, 12 Dec 2007 00:28:05 -0800 Subject: Shutdown pquest SNF 2007-12-12 00:28:05: Broken wafer Message-ID: My dummy wafer broke and left a wafer fragment on the chuck. The piece must be removed before the system can be used again. From cbaxter at snf.stanford.edu Wed Dec 12 08:52:10 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 12 Dec 2007 08:52:10 -0800 Subject: Shutdown pquest SNF 2007-12-12 00:28:05: Broken wafer Message-ID: Cleaned up broken wafer chips and made minor adjustement on wafer handoff from arm to chamber load. From eenriquez at snf.stanford.edu Fri Dec 14 14:54:50 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 14 Dec 2007 14:54:50 -0800 Subject: Comment pquest SNF 2007-12-14 14:54:50: Large vibration, wafer clamp problem Message-ID: Found the wafer clamp position sensor and the clamp itself was out of sync. When the clamp was at the bottom position, the sensor flag was in between the mid and the bottom sensor. As a result, the motor kept on driving the clamp. Synchronized the clamp and clamp sensor. Cycled clamp up and down with no problems. Jim K will cycle wafers through the system and run an O2 clean. From jimkruger at snf.stanford.edu Fri Dec 14 16:50:39 2007 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Fri, 14 Dec 2007 16:50:39 -0800 Subject: Comment pquest SNF 2007-12-14 16:50:38: PQuest status 12-14-07 4:30 pm Message-ID: After Elmer removed my lost wafer and re-adjusted the clamp drive "timing belt", I cycled a wafer and ran "Oxygen3" clean for 30 or 40 minutes. Advanced training note: if you hear a loud grinding noise on loading a wafer, hte belt may have slipeed again. Hit the "escape" key on the keyboard to stop mechanical motion and note the problem on Coral. From jimkruger at snf.stanford.edu Fri Dec 14 17:46:01 2007 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Fri, 14 Dec 2007 17:46:01 -0800 Subject: Shutdown pquest SNF 2007-12-14 17:46:00: Foreline high, turbo failed, possible Cl2 in chamber Message-ID: Last user "Koseki" reports failure. software waitng for "Throttle closed sensor", not responding. foreline = 1999 mTorr, turbo =failed. was still levitaing but i "Stop"ed levitation. Likely Cl2 still in chamber. From cbaxter at snf.stanford.edu Sun Dec 16 07:40:14 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 16 Dec 2007 07:40:14 -0800 Subject: Shutdown pquest SNF 2007-12-14 17:46:00: Foreline high, turbo failed, possible Cl2 in chamber Message-ID: The foreline pump tripped, reset pump and set over pressure switch. Pumped out chamber and purge with n2. From wwang at snf.stanford.edu Sun Dec 16 16:52:30 2007 From: wwang at snf.stanford.edu (wwang at snf.stanford.edu) Date: Sun, 16 Dec 2007 16:52:30 -0800 Subject: Shutdown pquest SNF 2007-12-16 16:52:29: can't unload wafer Message-ID: test wafer still inside chamber From cbaxter at snf.stanford.edu Mon Dec 17 08:18:51 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 17 Dec 2007 08:18:51 -0800 Subject: Shutdown pquest SNF 2007-12-16 16:52:29: can't unload wafer Message-ID: unload wafer from chamber.