December 2007 Archives by subject

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Starting: Sun Dec 2 20:16:47 PST 2007
Ending: Mon Dec 17 08:18:51 PST 2007
Messages: 13

• Comment pquest SNF 2007-12-05 15:45:00: strange etch results   vsih at snf.stanford.edu
• Comment pquest SNF 2007-12-14 14:54:50: Large vibration, wafer clamp problem   eenriquez at snf.stanford.edu
• Comment pquest SNF 2007-12-14 16:50:38: PQuest status 12-14-07 4:30 pm   jimkruger at snf.stanford.edu
• Shutdown pquest SNF 2007-12-02 20:16:46: Wafer broken   jparker at snf.stanford.edu
• Shutdown pquest SNF 2007-12-02 20:16:46: Wafer broken   cbaxter at snf.stanford.edu
• Shutdown pquest SNF 2007-12-11 02:42:32: pressure interlock alarm, process pump ready alarm   wwang at snf.stanford.edu
• Shutdown pquest SNF 2007-12-11 02:42:32: pressure interlock alarm, process pump ready alarm   cbaxter at snf.stanford.edu
• Shutdown pquest SNF 2007-12-12 00:28:05: Broken wafer   gibby at snf.stanford.edu
• Shutdown pquest SNF 2007-12-12 00:28:05: Broken wafer   cbaxter at snf.stanford.edu
• Shutdown pquest SNF 2007-12-14 17:46:00: Foreline high, turbo failed, possible Cl2 in chamber   jimkruger at snf.stanford.edu
• Shutdown pquest SNF 2007-12-14 17:46:00: Foreline high, turbo failed, possible Cl2 in chamber   cbaxter at snf.stanford.edu
• Shutdown pquest SNF 2007-12-16 16:52:29: can't unload wafer   wwang at snf.stanford.edu
• Shutdown pquest SNF 2007-12-16 16:52:29: can't unload wafer   cbaxter at snf.stanford.edu

Last message date: Mon Dec 17 08:18:51 PST 2007
Archived on: Fri Jan 11 13:09:47 PST 2013

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