Shutdown pquest SNF 2007-01-21 09:16:05: Robot

sdogbe at snf.stanford.edu sdogbe at snf.stanford.edu
Sun Jan 21 09:16:05 PST 2007


Chamber door could not open for robot arm to pick wafer from the etch chamber. Proceeding robot arm could not retract at the door and the system continued to make grinding sound.  Hit the emergency stop button to shut down the system. 




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