From gibby at snf.stanford.edu Sun Jul 1 18:22:59 2007 From: gibby at snf.stanford.edu (gibby at snf.stanford.edu) Date: Sun, 1 Jul 2007 18:22:59 -0700 Subject: Shutdown pquest SNF 2007-07-01 18:22:58: Wafer stuck Message-ID: Last user left a wafer on the chuck. When a new wafer was loaded, the wafer on the chuck slid off so that it can no longer be moved by the pins. From eenriquez at snf.stanford.edu Mon Jul 2 10:56:29 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 2 Jul 2007 10:56:29 -0700 Subject: Shutdown pquest SNF 2007-07-01 18:22:58: Wafer stuck Message-ID: Wet cleaned chamber and ran O2 clean. From jimkruger at snf.stanford.edu Tue Jul 3 21:07:29 2007 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Tue, 3 Jul 2007 21:07:29 -0700 Subject: Problem pquest SNF 2007-07-03 21:07:28: Backside He flow too high Message-ID: He flow is 8 or 8.2 for P=10 Torr. Too high, wafer cooling compromised. Either the chuck O-ring is damaged or there are particles on the chuck. Needs chuck cleaned or O-ring replaced. From eenriquez at snf.stanford.edu Thu Jul 5 10:04:27 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 5 Jul 2007 10:04:27 -0700 Subject: Problem pquest SNF 2007-07-03 21:07:28: Backside He flow too high Message-ID: No problem found. Ran O2 plasma clean recipe. Backside He flow was 5.5 sccm @ 10 T From xhlim at snf.stanford.edu Sun Jul 8 22:18:26 2007 From: xhlim at snf.stanford.edu (xhlim at snf.stanford.edu) Date: Sun, 8 Jul 2007 22:18:26 -0700 Subject: Problem pquest SNF 2007-07-08 22:18:24: Chamber Pressure High Message-ID: Chamber pressure is 94mTorr. From xhlim at snf.stanford.edu Sun Jul 8 22:33:00 2007 From: xhlim at snf.stanford.edu (xhlim at snf.stanford.edu) Date: Sun, 8 Jul 2007 22:33:00 -0700 Subject: Comment pquest SNF 2007-07-08 22:33:00: Can't get it to go idle now Message-ID: From eenriquez at snf.stanford.edu Mon Jul 9 08:38:24 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 9 Jul 2007 08:38:24 -0700 Subject: Comment pquest SNF 2007-07-09 08:38:24: Down for BCl3 and CH4 work Message-ID: Down for BCl3 andCH4 PQuest2 tie-ins. From eenriquez at snf.stanford.edu Tue Jul 10 08:16:59 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 10 Jul 2007 08:16:59 -0700 Subject: Shutdown pquest SNF 2007-07-10 08:16:58: PQuest2 BCl3 tie in Message-ID: From mtang at snf.stanford.edu Tue Jul 10 09:06:22 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 10 Jul 2007 09:06:22 -0700 Subject: Comment pquest SNF 2007-07-10 09:06:21: BCl3 should be done by end of today Message-ID: From eenriquez at snf.stanford.edu Tue Jul 10 14:11:00 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 10 Jul 2007 14:11:00 -0700 Subject: Comment pquest SNF 2007-07-10 09:06:21: BCl3 should be done by end of today Message-ID: Problem with a fitting for the BCl3 tie-in. Should be done by end of the day tomorrow. From eenriquez at snf.stanford.edu Tue Jul 10 14:11:53 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 10 Jul 2007 14:11:53 -0700 Subject: Comment pquest SNF 2007-07-10 14:11:53: BCl3 update.. Down 'till tomorrow Message-ID: Problem with a fitting for the BCl3 tie-in. Should be done by end of the day tomorrow. From eenriquez at snf.stanford.edu Wed Jul 11 17:23:33 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 11 Jul 2007 17:23:33 -0700 Subject: Comment pquest SNF 2007-07-10 14:11:53: BCl3 update.. Down 'till tomorrow Message-ID: From eenriquez at snf.stanford.edu Wed Jul 11 17:25:46 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 11 Jul 2007 17:25:46 -0700 Subject: Comment pquest SNF 2007-07-11 17:25:45: BCl3 update Message-ID: Started 24 hours leak check at around 10:30am. If it passes the pressure test, will release system by 11:00am From eenriquez at snf.stanford.edu Thu Jul 12 11:05:08 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 12 Jul 2007 11:05:08 -0700 Subject: Problem pquest SNF 2007-07-08 22:18:24: Chamber Pressure High Message-ID: Restarted the turbo pump. Ran O2 clean with no problem. From eenriquez at snf.stanford.edu Thu Jul 12 11:05:24 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 12 Jul 2007 11:05:24 -0700 Subject: Comment pquest SNF 2007-07-08 22:33:00: Can't get it to go idle now Message-ID: Restarted the turbo pump From eenriquez at snf.stanford.edu Thu Jul 12 11:06:31 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 12 Jul 2007 11:06:31 -0700 Subject: Shutdown pquest SNF 2007-07-10 08:16:58: PQuest2 BCl3 tie in Message-ID: Completed the BCl3 tie-in. Passed the 24hr pressure leak test. From eenriquez at snf.stanford.edu Thu Jul 12 11:06:40 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 12 Jul 2007 11:06:40 -0700 Subject: Comment pquest SNF 2007-07-09 08:38:24: Down for BCl3 and CH4 work Message-ID: Completed the BCl3 tie-in. Passed the 24hr pressure leak test. From eenriquez at snf.stanford.edu Thu Jul 12 11:06:51 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 12 Jul 2007 11:06:51 -0700 Subject: Comment pquest SNF 2007-07-11 17:25:45: BCl3 update Message-ID: Completed the BCl3 tie-in. Passed the 24hr pressure leak test. From mgobet at snf.stanford.edu Fri Jul 13 09:46:01 2007 From: mgobet at snf.stanford.edu (mgobet at snf.stanford.edu) Date: Fri, 13 Jul 2007 09:46:01 -0700 Subject: Comment pquest SNF 2007-07-13 09:45:59: Cl2 sccm reads high Message-ID: Although the Cl2 sccm is set to 1.5, it appears to be 3.1 sccm. It happened in the past that it was up to 2.4, but never as high as 3.1 sccm. From mgobet at snf.stanford.edu Mon Jul 16 12:49:13 2007 From: mgobet at snf.stanford.edu (mgobet at snf.stanford.edu) Date: Mon, 16 Jul 2007 12:49:13 -0700 Subject: Problem pquest SNF 2007-07-16 12:49:12: Terrible loadlock smell Message-ID: When the loadlock is closed it smells terribly bad. Jim mentioned it may be the oil that needs to be changed. Can you please check? Thanks. From cbaxter at snf.stanford.edu Mon Jul 16 14:09:53 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 16 Jul 2007 14:09:53 -0700 Subject: Problem pquest SNF 2007-07-16 12:49:12: Terrible loadlock smell Message-ID: Changed load lock oil and also, changed demister filter. From vsih at snf.stanford.edu Sun Jul 29 15:12:31 2007 From: vsih at snf.stanford.edu (vsih at snf.stanford.edu) Date: Sun, 29 Jul 2007 15:12:31 -0700 Subject: Problem pquest SNF 2007-07-29 15:12:30: Cl2 sccm high Message-ID: Set to 2.3, but reads 3.0. From mtang at snf.stanford.edu Mon Jul 30 09:15:34 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 30 Jul 2007 09:15:34 -0700 Subject: Problem pquest SNF 2007-07-29 15:12:30: Cl2 sccm high Message-ID: System is running to spec (the range on the MFC is 100 sccm, they are spec'ed to run within a couple percent of full range). The recipe is on the edge of the capability of the MFC. It is recommended to try to run the higher flow recipe (as per Jim Kruger.) If you absolutely require higher precision control at the low flow, please discuss your needs with SNF staff. From eenriquez at snf.stanford.edu Mon Jul 30 13:49:09 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 30 Jul 2007 13:49:09 -0700 Subject: Comment pquest SNF 2007-07-13 09:45:59: Cl2 sccm reads high Message-ID: Lowered Cl2 cylinder pressure to 15 psi. Now able to "control" flow as low as 1.6 sccm.