Shutdown pquest SNF 2007-07-01 18:22:58: Wafer stuck

gibby at snf.stanford.edu gibby at snf.stanford.edu
Sun Jul 1 18:22:59 PDT 2007


Last user left a wafer on the chuck.  When a new wafer was loaded, the wafer on the chuck slid off so that it can no longer be moved by the pins.




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