Shutdown pquest SNF 2007-07-01 18:22:58: Wafer stuck
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Mon Jul 2 10:56:29 PDT 2007
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Shutdown pquest SNF 2007-07-01 18:22:58: Wafer stuck
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Problem pquest SNF 2007-07-03 21:07:28: Backside He flow too high
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Wet cleaned chamber and ran O2 clean.
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Shutdown pquest SNF 2007-07-01 18:22:58: Wafer stuck
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Problem pquest SNF 2007-07-03 21:07:28: Backside He flow too high
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