Problem pquest SNF 2007-07-03 21:07:28: Backside He flow too high

jimkruger at snf.stanford.edu jimkruger at snf.stanford.edu
Tue Jul 3 21:07:29 PDT 2007


He flow is 8 or 8.2 for P=10 Torr.  Too high, wafer cooling compromised.  Either the chuck O-ring is damaged or there are particles on the chuck.  Needs chuck cleaned or O-ring replaced.




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