Problem pquest SNF 2007-07-03 21:07:28: Backside He flow too high

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Thu Jul 5 10:04:27 PDT 2007


No problem found.  Ran O2 plasma clean recipe.  Backside He flow was 5.5 sccm @ 10 T




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