Problem pquest SNF 2007-07-29 15:12:30: Cl2 sccm high

mtang at snf.stanford.edu mtang at snf.stanford.edu
Mon Jul 30 09:15:34 PDT 2007


System is running to spec (the range on the MFC is 100 sccm, they are spec'ed to run within a couple percent of full range).  The recipe is on the edge of the capability of the MFC.  It is recommended to try to run the higher flow recipe (as per Jim Kruger.)  If you absolutely require higher precision control at the low flow, please discuss your needs with SNF staff.




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