Problem pquest SNF 2007-06-22 03:42:40: Plasma does not turn on

xhlim at snf.stanford.edu xhlim at snf.stanford.edu
Fri Jun 22 03:42:41 PDT 2007


Plasma does not turn on. Chamber pressure seems too high, about 50-80mTorr. I think it is supposed tobe 2 mTorr, but it isn't.




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