From eenriquez at snf.stanford.edu Thu Mar 1 08:31:43 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 1 Mar 2007 08:31:43 -0800 Subject: Shutdown pquest SNF 2007-02-28 23:24:11: broken wafer piece Message-ID: Opened chamber. Did not find any pieces of wafer. Ran O2 plasma clean. From jimkruger at snf.stanford.edu Wed Mar 7 18:05:15 2007 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Wed, 7 Mar 2007 18:05:15 -0800 Subject: Problem pquest SNF 2007-03-07 18:05:15: He flow went high Message-ID: the first few wafers were OK, He = 5 or 6 but then the He flow went high, to 9 or 10. I suspect particles on the chuck, needs wet clean, especially the chuck. I cant explain why.The result is loss of cooling because the backside He pressure is about zero. From cbaxter at snf.stanford.edu Thu Mar 8 08:44:26 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 8 Mar 2007 08:44:26 -0800 Subject: Problem pquest SNF 2007-03-07 18:05:15: He flow went high Message-ID: Vented chamber and found broken wafer, vacuumed broken pieces of wafer chips. Cleaned chuck o-ring and run o2 clean plasma. From ifushman at snf.stanford.edu Wed Mar 21 19:23:07 2007 From: ifushman at snf.stanford.edu (ifushman at snf.stanford.edu) Date: Wed, 21 Mar 2007 19:23:07 -0700 Subject: Problem pquest SNF 2007-03-21 19:23:05: lost sample in p-quest Message-ID: Hi, My sample was lost in the p-quest. It is a ~ 3/8 inch x 1/4 inch piece of GaAs. If it can be recovered, that would be great. If it doesn't matter for the etching, then I guess it's a loss. I left a box with my name and tweezers next to the p-quest. -ilya 650 804 1058 From cbaxter at snf.stanford.edu Thu Mar 22 10:26:52 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 22 Mar 2007 10:26:52 -0700 Subject: Problem pquest SNF 2007-03-21 19:23:05: lost sample in p-quest Message-ID: Vented chamber and removed sample wafer. From jimkruger at snf.stanford.edu Tue Mar 27 15:42:05 2007 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Tue, 27 Mar 2007 15:42:05 -0700 Subject: Shutdown pquest SNF 2007-03-27 15:42:05: Broke wafer in system while unloading Message-ID: Needs cleanup of broken wafer From eenriquez at snf.stanford.edu Wed Mar 28 07:17:51 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 28 Mar 2007 07:17:51 -0700 Subject: Comment pquest SNF 2007-03-28 07:17:51: Update Message-ID: Ran O2 plasma clean. Now venting system. From eenriquez at snf.stanford.edu Wed Mar 28 09:41:20 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 28 Mar 2007 09:41:20 -0700 Subject: Shutdown pquest SNF 2007-03-27 15:42:05: Broke wafer in system while unloading Message-ID: Cleaned chamber. Cycled wafer and ran O2 plasma clean. From eenriquez at snf.stanford.edu Wed Mar 28 09:41:30 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 28 Mar 2007 09:41:30 -0700 Subject: Comment pquest SNF 2007-03-28 07:17:51: Update Message-ID: Cleaned chamber. Cycled wafer and ran O2 plasma clean. From mtang at snf.stanford.edu Thu Mar 29 09:11:17 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 29 Mar 2007 09:11:17 -0700 Subject: Problem pquest SNF 2007-03-29 09:11:17: Do not use BCl3 Message-ID: BCl3 cylinder needs to be changed out. Please do not use BCl3. Should be available Friday afternoon. From eenriquez at snf.stanford.edu Fri Mar 30 14:03:26 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 30 Mar 2007 14:03:26 -0700 Subject: Comment pquest SNF 2007-03-30 14:03:26: BCl3 update Message-ID: First leak check failed. Second leak check looks promising. If it passes the pressure test, it should be up by noon tomorrow 3/31. From seymour at snf.stanford.edu Sat Mar 31 11:44:23 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Sat, 31 Mar 2007 11:44:23 -0700 Subject: Comment pquest SNF 2007-03-30 14:03:26: BCl3 update Message-ID: leak check passed From seymour at snf.stanford.edu Sat Mar 31 11:44:55 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Sat, 31 Mar 2007 11:44:55 -0700 Subject: Problem pquest SNF 2007-03-29 09:11:17: Do not use BCl3 Message-ID: leak check passed, line charged with BCL3