Problem pquest SNF 2007-03-07 18:05:15: He flow went high

jimkruger at snf.stanford.edu jimkruger at snf.stanford.edu
Wed Mar 7 18:05:15 PST 2007


the first few wafers were OK, He = 5 or 6 but then the He flow went high, to 9 or 10.  I suspect particles on the chuck, needs wet clean, especially the chuck.
I cant explain why.The result is loss of cooling because the backside He pressure is about zero.




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