Problem pquest SNF 2007-03-07 18:05:15: He flow went high

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Thu Mar 8 08:44:26 PST 2007


Vented chamber and found broken wafer, vacuumed 
broken  pieces of wafer chips. Cleaned chuck o-ring 
and run o2 clean plasma.




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