Comment pquest SNF 2007-03-28 07:17:51: Update
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Wed Mar 28 07:17:51 PDT 2007
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Shutdown pquest SNF 2007-03-27 15:42:05: Broke wafer in system while unloading
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Comment pquest SNF 2007-03-28 07:17:51: Update
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Ran O2 plasma clean. Now venting system.
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Shutdown pquest SNF 2007-03-27 15:42:05: Broke wafer in system while unloading
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Comment pquest SNF 2007-03-28 07:17:51: Update
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