Comment pquest SNF 2007-03-28 07:17:51: Update
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Wed Mar 28 09:41:30 PDT 2007
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Comment pquest SNF 2007-03-28 07:17:51: Update
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Problem pquest SNF 2007-03-29 09:11:17: Do not use BCl3
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Cleaned chamber. Cycled wafer and ran O2 plasma clean.
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Comment pquest SNF 2007-03-28 07:17:51: Update
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Problem pquest SNF 2007-03-29 09:11:17: Do not use BCl3
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