From eenriquez at snf.stanford.edu Wed May 2 09:52:04 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 2 May 2007 09:52:04 -0700 Subject: Comment pquest SNF 2007-05-02 09:52:03: Replaced Cl2 sensor Message-ID: Now waiting for Ted to Ok before Cl2 can be turned on. From eenriquez at snf.stanford.edu Wed May 2 14:36:42 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 2 May 2007 14:36:42 -0700 Subject: Shutdown pquest SNF 2007-04-28 12:31:51: Possible chlorine leak .... Message-ID: Replaced bad Cl2 sensor. Ray verified that the Cl2 gas line is leak tight. BCl3 line was also ok. Verified flows at the tool. From eenriquez at snf.stanford.edu Wed May 2 14:36:58 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 2 May 2007 14:36:58 -0700 Subject: Problem pquest SNF 2007-04-27 10:22:05: Cl2 not avail. Message-ID: Replaced bad Cl2 sensor. Ray verified that the Cl2 gas line is leak tight. BCl3 line was also ok. Verified flows at the tool. From eenriquez at snf.stanford.edu Wed May 2 14:37:08 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 2 May 2007 14:37:08 -0700 Subject: Comment pquest SNF 2007-05-02 09:52:03: Replaced Cl2 sensor Message-ID: Replaced bad Cl2 sensor. Ray verified that the Cl2 gas line is leak tight. BCl3 line was also ok. Verified flows at the tool. From eenriquez at snf.stanford.edu Wed May 2 14:37:18 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 2 May 2007 14:37:18 -0700 Subject: Comment pquest SNF 2007-04-04 17:38:25: Completed monthly chamber clean Message-ID: From eenriquez at snf.stanford.edu Mon May 14 12:29:20 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 14 May 2007 12:29:20 -0700 Subject: Shutdown pquest SNF 2007-05-14 12:29:16: No cooling water Message-ID: Water shut-off due to TEL install. From cbaxter at snf.stanford.edu Mon May 14 13:53:31 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 14 May 2007 13:53:31 -0700 Subject: Shutdown pquest SNF 2007-05-14 12:29:16: No cooling water Message-ID: Cooling water is back on, ramped up turbo to speed. From jimkruger at snf.stanford.edu Fri May 25 15:45:20 2007 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Fri, 25 May 2007 15:45:20 -0700 Subject: Problem pquest SNF 2007-05-25 15:45:19: Broken wafer in chamber Message-ID: Broke unloading--don't know why. From jimkruger at snf.stanford.edu Fri May 25 15:50:11 2007 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Fri, 25 May 2007 15:50:11 -0700 Subject: Shutdown pquest SNF 2007-05-25 15:50:11: broken wafer in chamber Message-ID: From cbaxter at snf.stanford.edu Tue May 29 09:13:54 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 29 May 2007 09:13:54 -0700 Subject: Shutdown pquest SNF 2007-05-25 15:50:11: broken wafer in chamber Message-ID: Cleaned up broken wafer and also, wet cleaned chamber. From cbaxter at snf.stanford.edu Tue May 29 09:14:04 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 29 May 2007 09:14:04 -0700 Subject: Problem pquest SNF 2007-05-25 15:45:19: Broken wafer in chamber Message-ID: From cbaxter at snf.stanford.edu Tue May 29 09:18:33 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 29 May 2007 09:18:33 -0700 Subject: Comment pquest SNF 2007-05-29 09:18:33: Monthly chamber wet clean completed. Message-ID: