From krivoire at snf.stanford.edu Thu Nov 1 20:08:02 2007 From: krivoire at snf.stanford.edu (krivoire at snf.stanford.edu) Date: Thu, 1 Nov 2007 20:08:02 -0700 Subject: Shutdown pquest SNF 2007-11-01 20:08:02: carrier wafer broke in chamber Message-ID: sensor detected wafer incorrectly; tried to load when wafer had already been loaded, and wafer broke in chamber. sorry! i hit stop, and screen hung-says waiting for process chamber entry gate to close From cbaxter at snf.stanford.edu Fri Nov 2 09:13:42 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 2 Nov 2007 09:13:42 -0700 Subject: Shutdown pquest SNF 2007-11-01 20:08:02: carrier wafer broke in chamber Message-ID: Reset system and cleaned up broken wafer on chamber. Also, completed monthly chamber wet clean. From yiyang at snf.stanford.edu Mon Nov 5 15:30:26 2007 From: yiyang at snf.stanford.edu (yiyang at snf.stanford.edu) Date: Mon, 5 Nov 2007 15:30:26 -0800 Subject: Problem pquest SNF 2007-11-05 15:30:26: seal not so good Message-ID: The oring seal was not good (He flow was over 10ccm) and my carrier wafer was burnt during seasoning. I think my carrier wafer was fairly clean. Next user please confirm seasoning results. Please also log your runs. From gibby at snf.stanford.edu Wed Nov 7 06:46:13 2007 From: gibby at snf.stanford.edu (gibby at snf.stanford.edu) Date: Wed, 7 Nov 2007 06:46:13 -0800 Subject: Comment pquest SNF 2007-11-07 06:46:13: Program stopped suddenly Message-ID: I was running an O2 clean using the oxygen3 program. The run still had about 600s to go when I decided to end the etch. When I picked up the light pen, the etch suddenly stopped and the intro screen came up. The system behaved normally afterwards; I didn't see the glicth again. I felt, though, that it was worth noting in case other users notice the same problem. From cbaxter at snf.stanford.edu Wed Nov 7 10:01:42 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 7 Nov 2007 10:01:42 -0800 Subject: Problem pquest SNF 2007-11-05 15:30:26: seal not so good Message-ID: Vented chamber and re-seated chuck oring. Also, we found some wafer chips on bottom of the chamber, did it break wafer again?. Anyway JimK tested the tool and backside he leak improved. From gibby at snf.stanford.edu Thu Nov 8 09:03:40 2007 From: gibby at snf.stanford.edu (gibby at snf.stanford.edu) Date: Thu, 8 Nov 2007 09:03:40 -0800 Subject: Comment pquest SNF 2007-11-08 09:03:39: Large Vibration Message-ID: At the end of an etch, the machine started vibrating. The vibration was large enough to shake my wafer off of the loading pins so that I could not unload the wafer. Thanks to Caesar for helping unload the chamber without breaking my wafer. From tdo at snf.stanford.edu Tue Nov 13 01:41:55 2007 From: tdo at snf.stanford.edu (tdo at snf.stanford.edu) Date: Tue, 13 Nov 2007 01:41:55 -0800 Subject: Problem pquest SNF 2007-11-13 01:41:54: odd etch results Message-ID: ran a known recipe (gaas-etch) and observed unusual etch results. etch rate was much slower than expected (about half) and surface was extremely rough (visibly milky). this is especially odd since i did not see the same result after the seasoning where i ran a dummy wafer through immediately before. i will try another etch tomorrow and report if i see the same results. From tdo at snf.stanford.edu Tue Nov 13 16:21:31 2007 From: tdo at snf.stanford.edu (tdo at snf.stanford.edu) Date: Tue, 13 Nov 2007 16:21:31 -0800 Subject: Comment pquest SNF 2007-11-13 16:21:29: re: odd etch results Message-ID: the cause of the previous etch problems (low rate, bad morphology) was due to problems related to the RF power supply and tuning system (not the ECR/microwave). after several test runs, the problem did repeat itself several times: low RF power (7 W instead of 44W), all of it reflected. the automatic tuning system thus could not tune (uncertain if this is a power supply problem, tuning system problem, or both). the problems were very unpredictable-- some recipes worked, others did not at times. now the system is working as expected and rf power is normal (after 3 normal runs). if any other users notice similar problems, please report. an obvious sign is a DC bias value that is abnormal (in my GaAs recipe should be ~ -60V, when misbehaving it was -4 V). Keep an eye on RF power values during etches. From cbaxter at snf.stanford.edu Wed Nov 14 13:08:09 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 14 Nov 2007 13:08:09 -0800 Subject: Problem pquest SNF 2007-11-13 01:41:54: odd etch results Message-ID: see user comment on 11/13. From sdogbe at snf.stanford.edu Thu Nov 15 07:03:53 2007 From: sdogbe at snf.stanford.edu (sdogbe at snf.stanford.edu) Date: Thu, 15 Nov 2007 07:03:53 -0800 Subject: Shutdown pquest SNF 2007-11-15 07:03:47: Wafer retrieval Message-ID: Robot unable to unload wafer from etch chamber after etch. From cbaxter at snf.stanford.edu Thu Nov 15 09:56:55 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 15 Nov 2007 09:56:55 -0800 Subject: Shutdown pquest SNF 2007-11-15 07:03:47: Wafer retrieval Message-ID: Recovered wafer from chamber, i cycled wafer from l/l to chamber and back to l/l w/out problem. From krivoire at snf.stanford.edu Sat Nov 24 14:48:51 2007 From: krivoire at snf.stanford.edu (krivoire at snf.stanford.edu) Date: Sat, 24 Nov 2007 14:48:51 -0800 Subject: Problem pquest SNF 2007-11-24 14:48:50: RF power, DC bias too low Message-ID: RF power and DC bias are too low. My recipe requires RF power =70W, DC bias = -60V. I got RF power 15-20W forward P(6-7W reflected) and DC bias <20V. Microwave power is fine. From jimkruger at snf.stanford.edu Sun Nov 25 11:26:43 2007 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Sun, 25 Nov 2007 11:26:43 -0800 Subject: Problem pquest SNF 2007-11-25 11:26:42: RF now looks OK Message-ID: I found the system with the RF tuning and power "lost". After some struggle with resetting, It noq seems back to normal. From jimkruger at snf.stanford.edu Sun Nov 25 13:42:39 2007 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Sun, 25 Nov 2007 13:42:39 -0800 Subject: Problem pquest SNF 2007-11-25 13:42:38: I was wrong, RF intermittant. Message-ID: Reports wrong Fwd power and/or bias voltage intermittantly. From jimkruger at snf.stanford.edu Mon Nov 26 12:54:44 2007 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Mon, 26 Nov 2007 12:54:44 -0800 Subject: Problem pquest SNF 2007-11-26 12:54:43: PQuest RF some better Message-ID: Today I saw voltage "errors" of only about 10%. May be OK for non-critical but watch it carefully. From jimkruger at snf.stanford.edu Mon Nov 26 15:45:42 2007 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Mon, 26 Nov 2007 15:45:42 -0800 Subject: Problem pquest SNF 2007-11-26 15:45:42: PQuest RF seems OK, use with caution Message-ID: From mtang at snf.stanford.edu Wed Nov 28 09:10:26 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 28 Nov 2007 09:10:26 -0800 Subject: Problem pquest SNF 2007-11-24 14:48:50: RF power, DC bias too low Message-ID: Ray, Eric & Jim K worked on this. The generator appears to be fine and the problem is thought to have been in the communications to the system, although it is now working. Please use with caution. From mtang at snf.stanford.edu Wed Nov 28 09:10:36 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 28 Nov 2007 09:10:36 -0800 Subject: Problem pquest SNF 2007-11-25 11:26:42: RF now looks OK Message-ID: Ray, Eric & Jim K worked on this. The generator appears to be fine and the problem is thought to have been in the communications to the system, although it is now working. Please use with caution. From mtang at snf.stanford.edu Wed Nov 28 09:10:41 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 28 Nov 2007 09:10:41 -0800 Subject: Problem pquest SNF 2007-11-25 13:42:38: I was wrong, RF intermittant. Message-ID: Ray, Eric & Jim K worked on this. The generator appears to be fine and the problem is thought to have been in the communications to the system, although it is now working. Please use with caution. From mtang at snf.stanford.edu Wed Nov 28 09:10:47 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 28 Nov 2007 09:10:47 -0800 Subject: Problem pquest SNF 2007-11-26 12:54:43: PQuest RF some better Message-ID: Ray, Eric & Jim K worked on this. The generator appears to be fine and the problem is thought to have been in the communications to the system, although it is now working. Please use with caution. From mtang at snf.stanford.edu Wed Nov 28 09:10:57 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 28 Nov 2007 09:10:57 -0800 Subject: Problem pquest SNF 2007-11-26 15:45:42: PQuest RF seems OK, use with caution Message-ID: Ray, Eric & Jim K worked on this. The generator appears to be fine and the problem is thought to have been in the communications to the system, although it is now working. Please use with caution. From krivoire at snf.stanford.edu Thu Nov 29 15:49:39 2007 From: krivoire at snf.stanford.edu (krivoire at snf.stanford.edu) Date: Thu, 29 Nov 2007 15:49:39 -0800 Subject: Comment pquest SNF 2007-11-29 15:49:38: RF still inconsistent Message-ID: RF power/DC bias were low during my seasoning etch. (But fine during oxygen3 cleaning). I stopped and restarted the etch, and RF was fine, and stayed that way for the rest of my session.