Shutdown pquest SNF 2007-11-01 20:08:02: carrier wafer broke in chamber

krivoire at snf.stanford.edu krivoire at snf.stanford.edu
Thu Nov 1 20:08:02 PDT 2007


sensor detected wafer incorrectly; tried to load when wafer had already been loaded, and wafer broke in chamber. sorry!
i hit stop, and screen hung-says waiting for process chamber entry gate to close




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