Shutdown pquest SNF 2007-11-01 20:08:02: carrier wafer broke in chamber

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Fri Nov 2 09:13:42 PDT 2007

Previous message: Shutdown pquest SNF 2007-11-01 20:08:02: carrier wafer broke in chamber
Next message: Problem pquest SNF 2007-11-05 15:30:26: seal not so good
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Reset system and cleaned up broken wafer on chamber.
Also, completed monthly chamber wet clean.

Previous message: Shutdown pquest SNF 2007-11-01 20:08:02: carrier wafer broke in chamber
Next message: Problem pquest SNF 2007-11-05 15:30:26: seal not so good
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the pquest-pcs mailing list