Problem pquest SNF 2007-11-05 15:30:26: seal not so good

yiyang at snf.stanford.edu yiyang at snf.stanford.edu
Mon Nov 5 15:30:26 PST 2007


The oring seal was not good (He flow was over 10ccm) and my carrier wafer was burnt during seasoning. I think my carrier wafer was fairly clean. Next user please confirm seasoning results. Please also log your runs.




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