Comment pquest SNF 2007-11-07 06:46:13: Program stopped suddenly

gibby at snf.stanford.edu gibby at snf.stanford.edu
Wed Nov 7 06:46:13 PST 2007


I was running an O2 clean using the oxygen3 program.  The run still had about 600s to go when I decided to end the etch.  When I picked up the light pen, the etch suddenly stopped and the intro screen came up.  The system behaved normally afterwards; I didn't see the glicth again.  I felt, though, that it was worth noting in case other users notice the same problem.




More information about the pquest-pcs mailing list