Problem pquest SNF 2007-11-05 15:30:26: seal not so good

cbaxter at cbaxter at
Wed Nov 7 10:01:42 PST 2007

Vented chamber and re-seated chuck oring. Also,
we found some wafer chips on bottom of the chamber, 
did it break wafer again?. Anyway JimK tested the tool
and backside he leak improved.

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