Problem pquest SNF 2007-11-05 15:30:26: seal not so good

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Wed Nov 7 10:01:42 PST 2007


Vented chamber and re-seated chuck oring. Also,
we found some wafer chips on bottom of the chamber, 
did it break wafer again?. Anyway JimK tested the tool
and backside he leak improved.




More information about the pquest-pcs mailing list