Comment pquest SNF 2007-11-08 09:03:39: Large Vibration

gibby at snf.stanford.edu gibby at snf.stanford.edu
Thu Nov 8 09:03:40 PST 2007


At the end of an etch, the machine started vibrating.  The vibration was large enough to shake my wafer off of the loading pins so that I could not unload the wafer.   Thanks to Caesar for helping unload the chamber without breaking my wafer.




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