Problem pquest SNF 2007-11-13 01:41:54: odd etch results

tdo at snf.stanford.edu tdo at snf.stanford.edu
Tue Nov 13 01:41:55 PST 2007


ran a known recipe (gaas-etch) and observed unusual etch results.  etch rate was much slower than expected (about half) and surface was extremely rough (visibly milky).  this is especially odd since i did not see the same result after the seasoning where i ran a dummy wafer through immediately before.  i will try another etch tomorrow and report if i see the same results.  




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