Comment pquest SNF 2007-11-29 15:49:38: RF still inconsistent

krivoire at snf.stanford.edu krivoire at snf.stanford.edu
Thu Nov 29 15:49:39 PST 2007


RF power/DC bias were low during my seasoning etch. (But fine during oxygen3 cleaning). I stopped and restarted the etch, and RF was fine, and stayed that way for the rest of my session.




More information about the pquest-pcs mailing list