From eenriquez at snf.stanford.edu Tue Oct 2 08:27:54 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 2 Oct 2007 08:27:54 -0700 Subject: Comment pquest SNF 2007-10-02 08:27:54: Cl2 line work Message-ID: Contractors will be working on new and improved Cl2 line. From eenriquez at snf.stanford.edu Tue Oct 2 14:36:23 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 2 Oct 2007 14:36:23 -0700 Subject: Shutdown pquest SNF 2007-09-29 09:43:25: Message-ID: Restarted the turbo pump. Ran O2 clean. From eenriquez at snf.stanford.edu Tue Oct 2 14:36:38 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 2 Oct 2007 14:36:38 -0700 Subject: Problem pquest SNF 2007-09-29 06:35:11: Throttle Closed Sensor Message-ID: Restarted the turbo pump. Ran O2 clean. From gibby at snf.stanford.edu Sat Oct 6 14:14:23 2007 From: gibby at snf.stanford.edu (gibby at snf.stanford.edu) Date: Sat, 6 Oct 2007 14:14:23 -0700 Subject: Problem pquest SNF 2007-10-06 14:14:22: No BCl3 Flow Message-ID: For some reason, BCl3 has been shut off. Please re-enable ASAP. From mtang at snf.stanford.edu Mon Oct 8 15:39:01 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 8 Oct 2007 15:39:01 -0700 Subject: Problem pquest SNF 2007-10-08 15:39:00: SF6 is unavailable. Message-ID: Do not use SF6. Elmer is troubleshooting. From eenriquez at snf.stanford.edu Tue Oct 9 08:10:20 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 9 Oct 2007 08:10:20 -0700 Subject: Problem pquest SNF 2007-10-08 15:39:00: SF6 is unavailable. Message-ID: Leak has been isolated to either MRC or STSetcher. From eenriquez at snf.stanford.edu Wed Oct 10 07:56:38 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 10 Oct 2007 07:56:38 -0700 Subject: Problem pquest SNF 2007-10-06 14:14:22: No BCl3 Flow Message-ID: Verified BCl3 flow is OK From eenriquez at snf.stanford.edu Wed Oct 10 07:57:13 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 10 Oct 2007 07:57:13 -0700 Subject: Comment pquest SNF 2007-10-02 08:27:54: Cl2 line work Message-ID: Completed Cl2 line installation From cbaxter at snf.stanford.edu Mon Oct 15 10:50:29 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 15 Oct 2007 10:50:29 -0700 Subject: Comment pquest SNF 2007-10-15 10:50:29: wet clean Message-ID: Wet clean completed and also, changed he o-ring on chuck. From cbaxter at snf.stanford.edu Mon Oct 15 13:20:34 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 15 Oct 2007 13:20:34 -0700 Subject: Problem pquest SNF 2007-09-14 12:22:24: Available for non-Cl2 processes only Message-ID: Charge process cl2 gas line with live gas and set regulator @5psi. From yiyang at snf.stanford.edu Mon Oct 15 15:54:05 2007 From: yiyang at snf.stanford.edu (yiyang at snf.stanford.edu) Date: Mon, 15 Oct 2007 15:54:05 -0700 Subject: Problem pquest SNF 2007-10-15 15:54:04: Cl2 flow not there Message-ID: Cl2 flow does not go over 1sccm (asked for 2.2 or above 8) Once plasma starts, He pressure and Cl2 pressure go way up (22 and 10). Might be faulty readings. From eenriquez at snf.stanford.edu Tue Oct 16 08:03:34 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 16 Oct 2007 08:03:34 -0700 Subject: Problem pquest SNF 2007-10-15 15:54:04: Cl2 flow not there Message-ID: Adjusted regulator. Cl2 flow range is 1.5 - 43 sccm. From jimkruger at snf.stanford.edu Tue Oct 16 09:41:11 2007 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Tue, 16 Oct 2007 09:41:11 -0700 Subject: Problem pquest SNF 2007-10-16 09:41:10: 1) autoPurge flow too high 2) Cl2 flow drops to zero Message-ID: autoPurge at end of etch (for time=0 step) chamber goes to 94 mTorr, fore gose to 1400 mTorr. Flow must be set too high 2) Cl2 flow 1.5 wworked OK but if Cl2 set to 43, regulaor reading goes to 0, flow drops. Need to set new Cl2 regulator (5 psi?) while Cl2 flow is high (43). From cbaxter at snf.stanford.edu Tue Oct 16 10:06:53 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 16 Oct 2007 10:06:53 -0700 Subject: Problem pquest SNF 2007-10-16 09:41:10: 1) autoPurge flow too high 2) Cl2 flow drops to zero Message-ID: Adjusted (set) cl2 regulator @ 8psi, Jim K tested the tool we set the cl2 first @1.4sccm w/out problem and then change the cl2 flow @43sccm also w/out problem. pls leave the cl2 regulator @8psi. DO NOT ADJUST. From gibby at snf.stanford.edu Tue Oct 23 13:16:12 2007 From: gibby at snf.stanford.edu (gibby at snf.stanford.edu) Date: Tue, 23 Oct 2007 13:16:12 -0700 Subject: Problem pquest SNF 2007-10-23 13:16:05: Error accessing recipe editor Message-ID: I'm seeing an error when I try to access the recipe editor. If I load a recipe, access the recipe editor, close the editor and later try to access the editor again, I see an error that says the system cannot run the editor. If I load a recipe (even the same one) the editor will work again, but only once before I have to re-load a recipe. From cbaxter at snf.stanford.edu Wed Oct 24 08:15:06 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 24 Oct 2007 08:15:06 -0700 Subject: Problem pquest SNF 2007-10-23 13:16:05: Error accessing recipe editor Message-ID: Reboot the pc and no problem encountered with recipe editor From jimkruger at snf.stanford.edu Wed Oct 24 18:09:11 2007 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Wed, 24 Oct 2007 18:09:11 -0700 Subject: Shutdown pquest SNF 2007-10-24 18:09:10: Broken wafer in system Message-ID: Sorry From eenriquez at snf.stanford.edu Thu Oct 25 10:03:25 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 25 Oct 2007 10:03:25 -0700 Subject: Shutdown pquest SNF 2007-10-24 18:09:10: Broken wafer in system Message-ID: Cleaned chamber and ran O2 clean. From jimkruger at snf.stanford.edu Thu Oct 25 10:51:31 2007 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Thu, 25 Oct 2007 10:51:31 -0700 Subject: Comment pquest SNF 2007-10-25 10:51:31: PQuest up Message-ID: I ran "oxygen3" and checked leak up rate after broken wafer removal. Leak up is pretty good=1.2mTorr/min. Best ever = 1.0 mTorr / min. Sorry for the broken wafer error. jim