Problem pquest SNF 2007-10-15 15:54:04: Cl2 flow not there

yiyang at snf.stanford.edu yiyang at snf.stanford.edu
Mon Oct 15 15:54:05 PDT 2007


Cl2 flow does not go over 1sccm (asked for 2.2 or above 8)
Once plasma starts, He pressure and Cl2 pressure go way up (22 and 10). Might be faulty readings.




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