Problem pquest SNF 2007-10-16 09:41:10: 1) autoPurge flow too high 2) Cl2 flow drops to zero

jimkruger at snf.stanford.edu jimkruger at snf.stanford.edu
Tue Oct 16 09:41:11 PDT 2007


autoPurge at end of etch (for time=0 step) chamber goes to 94 mTorr, fore gose to 1400 mTorr.  Flow must be set too high
2)  Cl2 flow 1.5 wworked OK but if Cl2 set to 43, regulaor reading goes to 0, flow drops.
Need to set new Cl2 regulator (5 psi?) while Cl2 flow is high (43).




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