Comment pquest SNF 2007-10-25 10:51:31: PQuest up

jimkruger at snf.stanford.edu jimkruger at snf.stanford.edu
Thu Oct 25 10:51:31 PDT 2007


I ran "oxygen3" and checked leak up rate after broken wafer removal.  Leak up is pretty good=1.2mTorr/min.  Best ever = 1.0 mTorr / min.
Sorry for the broken wafer error.
jim




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