Comment pquest SNF 2007-10-25 10:51:31: PQuest up
jimkruger at snf.stanford.edu
jimkruger at snf.stanford.edu
Thu Oct 25 10:51:31 PDT 2007
I ran "oxygen3" and checked leak up rate after broken wafer removal. Leak up is pretty good=1.2mTorr/min. Best ever = 1.0 mTorr / min.
Sorry for the broken wafer error.
jim
More information about the pquest-pcs
mailing list