From jimkruger at snf.stanford.edu Sat Sep 1 19:24:49 2007 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Sat, 1 Sep 2007 19:24:49 -0700 Subject: Problem pquest SNF 2007-09-01 19:24:48: BackSide He seal leaking , also maybe the backside He flow meter has too much offset Message-ID: From jimkruger at snf.stanford.edu Sat Sep 1 19:25:39 2007 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Sat, 1 Sep 2007 19:25:39 -0700 Subject: Comment pquest SNF 2007-09-01 19:25:38: Light pen works better Message-ID: After Elmer tried to swap monitors, the light pen seems OK. From cbaxter at snf.stanford.edu Tue Sep 4 10:35:27 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 4 Sep 2007 10:35:27 -0700 Subject: Problem pquest SNF 2007-08-28 00:12:13: stylus nonresponsive Message-ID: From cbaxter at snf.stanford.edu Tue Sep 4 10:37:21 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 4 Sep 2007 10:37:21 -0700 Subject: Problem pquest SNF 2007-09-01 19:24:48: BackSide He seal leaking , also maybe the backside He flow meter has too much offset Message-ID: I cleaned the b/s o-ring and also found lots of byproduct build up on the edge of the chuck. From cbaxter at snf.stanford.edu Tue Sep 4 10:38:00 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 4 Sep 2007 10:38:00 -0700 Subject: Comment pquest SNF 2007-09-04 10:37:59: Completed monthly clean cleaned Message-ID: From emyers at snf.stanford.edu Wed Sep 12 17:58:10 2007 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Wed, 12 Sep 2007 17:58:10 -0700 Subject: Shutdown pquest SNF 2007-09-12 17:58:09: No Cl Message-ID: Shutdown due to Cl gas line being pumped down. From mtang at snf.stanford.edu Fri Sep 14 12:21:25 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 14 Sep 2007 12:21:25 -0700 Subject: Shutdown pquest SNF 2007-09-12 17:58:09: No Cl Message-ID: Up for non-Cl2 processing only. From mtang at snf.stanford.edu Fri Sep 14 12:22:24 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 14 Sep 2007 12:22:24 -0700 Subject: Problem pquest SNF 2007-09-14 12:22:24: Available for non-Cl2 processes only Message-ID: As chlorine is unavailable, the machine is now on the fluorine chemistry cycle. When Cl2 becomes available again, a chamber clean will be scheduled as appropriate. Apologies for the inconvenience. From sdogbe at snf.stanford.edu Sat Sep 29 06:35:14 2007 From: sdogbe at snf.stanford.edu (sdogbe at snf.stanford.edu) Date: Sat, 29 Sep 2007 06:35:14 -0700 Subject: Problem pquest SNF 2007-09-29 06:35:11: Throttle Closed Sensor Message-ID: Load Lock chamber unable to pump down because the Throttle Closed sensor is not working. From sdogbe at snf.stanford.edu Sat Sep 29 09:43:25 2007 From: sdogbe at snf.stanford.edu (sdogbe at snf.stanford.edu) Date: Sat, 29 Sep 2007 09:43:25 -0700 Subject: Shutdown pquest SNF 2007-09-29 09:43:25: Message-ID: System Failure